Stephen W. Bowler

The SCattering with Angular Limitation in Projection Electron-Beam Lithography (SCALPEL) System

J. Alexander Liddle, Steven D. Berger, C. J. Biddick et al. · Japanese Journal of Applied Physics · 1995 · 21 citations

Engineering, Electron-beam Lithography, Physics +12

Preliminary results from a prototype projection electron-beam stepper-scattering with angular limitation projection electron beam lithography proof-of-concept system

L. R. Harriott, S. D. Berger, C. J. Biddick et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

<title>Electron-optical design for the SCALPEL proof-of-concept tool</title>

W. K. Waskiewicz, Steven D. Berger, L. R. Harriott et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

Engineering, T Bell Laboratories, Physics +15

The SCALPEL proof of concept system

L. R. Harriott, S. D. Berger, C. J. Biddick et al. · Microelectronic Engineering · 1997 · 12 citations

Engineering, Inductive Inference, Automated Reasoning +5

SCALPEL proof-of-concept system: preliminary lithography results

W. K. Waskiewicz, Christopher J. Biddick, Myrtle I. Blakey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 11 citations

Engineering, Scattering Mask, Electron-beam Lithography +19