Concepedia

S. D. Berger

SD

Statistics

Publications

24

Citations

1.6K

H-Index

18

Active since

1982

Affiliations

AT&T (United States)(Current)

Cavendish Hospital

University of Cambridge

Integrated Systems Solutions (United States)

University of Illinois Urbana-Champaign

S. D. Berger is an author at AT&T (United States) specializing in natural sciences, electron beam lithography, and materials science.

Publications per year

1982–1997

24

Publications

24

EELS analysis of vacuum arc-deposited diamond-like films

S. D. Berger, David R. McKenzie, Phil Martin · Philosophical Magazine Letters · 1988 · 592 citations

Natural Sciences, Materials Science, Physics +11

New approach to projection-electron lithography with demonstrated 0.1 μm linewidth

S. D. Berger, J. M. Gibson · Applied Physics Letters · 1990 · 116 citations

Engineering, Electrical Engineering, Microfabrication +9

Elemental mapping with elastically scattered electrons

Stephen J. Pennycook, S. D. Berger, Robert Culbertson · Journal of Microscopy · 1986 · 111 citations

Natural Sciences, Chemistry, Materials Science +17

Electron energy-loss spectroscopy studies of nanometre-scale structures in alumina produced by intense electron-beam irradiation

S. D. Berger, I. G. Salisbury, R.H. Milne et al. · Philosophical Magazine B · 1987 · 107 citations

Natural Sciences, Materials Engineering, Materials Science +16

Nanometer scale electron beam lithography in inorganic materials

I. G. Salisbury, R. S. Timsit, S. D. Berger et al. · Applied Physics Letters · 1984 · 99 citations

Engineering, Materials Engineering, Materials Science +14

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