Nanometer scale electron beam lithography in inorganic materials

Abstract

Nanometer scale holes and lines have been produced directly in calcium fluoride, aluminium oxide, and magnesium oxide by an intense beam of electrons. There is a threshold beam current density for drilling, and the variation of this with voltage has been studied. Observations using electron energy loss spectroscopy have confirmed that metallic aluminium is produced during the drilling of aluminium oxide. Aluminium oxide may be drilled when in contact with the aluminium substrate, which remains undrilled.