Electron energy-loss spectroscopy studies of nanometre-scale structures in alumina produced by intense electron-beam irradiation

Abstract

Abstract Holes and lines with dimensions of a few nanometres can be formed in a variety of inorganic materials using a high-brightness field-emission electron gun. In this paper we follow the damage mechanism as holes are drilled in amorphous alumina and sodium beta-alumina using, primarily, electron energy-loss spectroscopy. It is found that drilling proceeds in very different ways in the two substances. In the case of the crystalline beta-alumina, material is removed sequentially from both surfaces, while in the amorphous alumina, holes are formed only after the production of subsurface bubbles of oxygen. We also report the direct production of metallic structures in some materials following electron-beam irradiation.