Pamela R. Fischer

High-k dielectrics for future generation memory devices (Invited Paper)

J. A. Kittl, Karl Opsomer, M. Popovici et al. · Microelectronic Engineering · 2009 · 246 citations

Electrical Engineering, Semiconductor Device, Engineering +7

Batch ALD: Characteristics, comparison with single wafer ALD, and examples

Ernst Granneman, Pamela R. Fischer, Dieter Pierreux et al. · Surface and Coatings Technology · 2007 · 116 citations

Aluminium Nitride, Electrical Engineering, Wafer Scale Processing +6

Assembly of Amphiphilic Phenylacetylene Macrocycles at the Air−Water Interface and on Solid Surfaces

Ashok S. Shetty, Pamela R. Fischer, Kurt F. Stork et al. · Journal of the American Chemical Society · 1996 · 44 citations

Supramolecular Assembly, Engineering, Molecular Self-assembly +19

High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

G. Druais, Gabriela Dilliway, Pamela R. Fischer et al. · Microelectronic Engineering · 2008 · 25 citations

Materials Engineering, Materials Science, Engineering +7

Opportunities in 3-D stacked CMOS transistors

M. Radosavljević, C.-Y. Huang, W. Rachmady et al. · 2021 IEEE International Electron Devices Meeting (IEDM) · 2021 · 24 citations

Promising Transistor Architecture, 3D Ic Architecture, Electrical Engineering +11