Concepedia

Ernst Granneman

EG

4

Publications

157

Citations

4

H-Index

2007

Active since

Affiliations

Renesas Electronics (Japan)(Current)

Ernst Granneman is an author at Renesas Electronics (Japan) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringSolar CellsPhotovoltaicsSurface ScienceMaterial ScienceMicroelectronicsMaterials EngineeringChemistry

Publications per year

2007–2016

4

Publications

4

Batch ALD: Characteristics, comparison with single wafer ALD, and examples

Ernst Granneman, Pamela R. Fischer, Dieter Pierreux et al. · Surface and Coatings Technology · 2007 · 116 citations

Aluminium Nitride, Electrical Engineering, Wafer Scale Processing +6

PID- and UVID-free n-type Solar Cells and Modules

Maciej K. Stodolny, G.J.M. Janssen, Bas B. Van Aken et al. · Energy Procedia · 2016 · 16 citations · Full text

Boron Profile, Electrical Engineering, Uv Radiation +14

(Invited) Spatial ALD, Deposition of Al<sub>2</sub>O<sub>3</sub> Films at Throughputs Exceeding 3000 Wafers per Hour

Ernst Granneman, P. Vermont · ECS Transactions · 2014 · 13 citations

Engineering, Photovoltaic Devices, Thin Film Process Technology +20

NiPt silicide agglomeration accompanied by stress relaxation in NiSi(010) ∥ Si(001) grains

Mariko Mizuo, Tadashi Yamaguchi, Xavier Llimona i Pagès et al. · Japanese Journal of Applied Physics · 2015 · 12 citations

Engineering, Crystal Growth Technology, Pt Segregation +16

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