Concepedia

Keiji Emoto

KE

3

Publications

36

Citations

3

H-Index

2016

Active since

Affiliations

Canon (Japan)(Current)

Canon (United States)

Keiji Emoto is an author at Canon (Japan) specializing in nanolithography, nanotechnology, and electronic packaging.

Top concepts

3D PrintingEngineeringNanotechnologyApplied PhysicsNanofabricationNanolithographyMaterial ScienceMicroelectronicsMicrofabricationNanomanufacturing

Publications per year

2016–2016

3

Publications

3

Nanoimprint System for High Volume Semiconductor Manufacturing; Requirement for Resist Materials

Toshiki Ito, Keiji Emoto, Tsuneo Takashima et al. · Journal of Photopolymer Science and Technology · 2016 · 14 citations · Full text

Engineering, Electron-beam Lithography, Pattern Transfer +22

Nanoimprint system development and status for high-volume semiconductor manufacturing

Tsuneo Takashima, Yukio Takabayashi, Naosuke Nishimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations

Engineering, Electron-beam Lithography, Wafer Scale Processing +20

Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing

Keiji Emoto, Fumio Sakai, Chiaki Sato et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations

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