Concepedia

Author

Keiji Emoto

Canon (Japan)

Also Known As

Keiji EMOTO, Keiji Emoto

6

Publications

44

Citations

4

H-Index

13

Concepts

All Affiliations

Canon (Japan)Canon (United States)
KE

About

Keiji Emoto is an author at Canon (Japan) specializing in nanolithography, nanotechnology, and electronic packaging.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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26

2

Applied Physics

2

2

26

3

Electrical Engineering

2

2

26

4

Materials Science

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2

26

5

Microelectronics

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2

26

Keiji Emoto

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3

Publications

36

Citations

3

H-Index

YearCitations

Nanoimprint System for High Volume Semiconductor Manufacturing; Requirement for Resist Materials

Toshiki Ito, Keiji Emoto, Tsuneo Takashima,

Journal of Photopolymer Science and Technology

2016

14

Nanoimprint system development and status for high-volume semiconductor manufacturing

Tsuneo Takashima, Yukio Takabayashi, Naosuke Nishimura,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

12

Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing

Keiji Emoto, Fumio Sakai, Chiaki Sato,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

10

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