Concepedia
1
Publications
10
Citations
H-Index
2016
Active since
Affiliations
Canon (Japan)(Current)
Chiaki Sato is an author at Canon (Japan).
Publications per year
2016–2016
Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing
Keiji Emoto, Fumio Sakai, Chiaki Sato et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations
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