Statistics
Publications
2
Citations
26
H-Index
2
Active since
2016
Affiliations
Canon (Japan)(Current)
Tsuneo Takashima is an author at Canon (Japan) specializing in nanolithography, nanotechnology, and electronic packaging.
Publications per year
2016–2016
2
2
Nanoimprint system development and status for high-volume semiconductor manufacturing
Tsuneo Takashima, Yukio Takabayashi, Naosuke Nishimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations
Engineering, Electron-beam Lithography, Wafer Scale Processing +20
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