Statistics
Publications
1
Citations
12
H-Index
1
Active since
2016
Affiliations
Canon (Japan)(Current)
Naosuke Nishimura is an author at Canon (Japan) specializing in substrate preparation, mask fabrication, and nanoimprint lithography.
Publications per year
2016–2016
1
1
Nanoimprint system development and status for high-volume semiconductor manufacturing
Tsuneo Takashima, Yukio Takabayashi, Naosuke Nishimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +13
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