Concepedia

Yukio Takabayashi

YT

3

Publications

36

Citations

3

H-Index

2016

Active since

Affiliations

Canon (Japan)(Current)

Canon (United States)

Yukio Takabayashi is an author at Canon (Japan) specializing in nanolithography, applied physics, and electronic packaging.

Top concepts

3D PrintingEngineeringApplied PhysicsNanolithographyMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical EngineeringNanotechnology

Publications per year

2016–2017

3

Publications

3

Nanoimprint system development for high-volume semiconductor manufacturing the and status of overlay performance

Yukio Takabayashi, Mitsuru Hiura, Hiroshi Morohoshi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

Engineering, Electron-beam Lithography, Advanced Manufacturing +20

Nanoimprint system development and status for high-volume semiconductor manufacturing

Tsuneo Takashima, Yukio Takabayashi, Naosuke Nishimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations

Engineering, Electron-beam Lithography, Wafer Scale Processing +20

Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing

Keiji Emoto, Fumio Sakai, Chiaki Sato et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations

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