Statistics
Publications
2
Citations
24
H-Index
2
Active since
2016
Affiliations
Canon (Japan)(Current)
Mitsuru Hiura is an author at Canon (Japan) specializing in defectivity control, imprint lithography, and semiconductor devices.
Publications per year
2016–2017
2
2
Keiji Emoto, Fumio Sakai, Chiaki Sato et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations
Engineering, Manufacturing Engineering, Materials Science +17
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