Concepedia

Hiroshi Morohoshi

HM

1

Publications

14

Citations

1

H-Index

2017

Active since

Affiliations

Canon (United States)(Current)

Hiroshi Morohoshi is an author at Canon (United States) specializing in nanolithography, applied physics, and electronic packaging.

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Publications per year

2017–2017

1

Publications

1

Nanoimprint system development for high-volume semiconductor manufacturing the and status of overlay performance

Yukio Takabayashi, Mitsuru Hiura, Hiroshi Morohoshi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 14 citations

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