Toshiki Ito - Concepedia

Author

Toshiki Ito

Also Known As

Toshiki ITO, Toshiki Ito

Publications

134

Citations

H-Index

Concepts

All Affiliations

Toshiki Ito is an author at Canon (Japan) specializing in materials science, microelectronics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	72
2	Applied Physics	3	3	72
3	Electrical Engineering	3	3	72
4	Materials Science	3	3	72
5	Integrated Circuits	2	2	58

Toshiki Ito

Publications

Citations

H-Index

Page 1

	Year	Citations
Fabrication of half-pitch 32nm resist patterns using near-field lithography with a-Si mask Toshiki Ito, Tomohiro Yamada, Yasuhisa Inao, Applied Physics Letters EngineeringElectron-beam LithographyHalf-pitch 32NmOptoelectronic DevicesIntegrated Circuits	2006	30
Fabrication of sub-100nm Patterns using Near-field Mask Lithography with Ultra-thin Resist Process Toshiki Ito, Masaya Ogino, Tomohiro Yamanaka, Journal of Photopolymer Science and Technology EngineeringElectron-beam LithographyPattern TransferIntegrated CircuitsNear-field Mask Lithography	2005	28
Biocompatibility of Composite Membrane Consisting of Oriented Needle-like Apatite and Biodegradable Copolymer with Soft and Hard Tissues in Rats T. Watanabe, Seiji Ban, Toshiki Ito, Dental Materials Journal	2004	16
Nanoimprint System for High Volume Semiconductor Manufacturing; Requirement for Resist Materials Toshiki Ito, Keiji Emoto, Tsuneo Takashima, Journal of Photopolymer Science and Technology EngineeringElectron-beam LithographyPattern TransferJ-fil TechnologyResist Materials	2016	14

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