Concepedia

Toshiki Ito

TI

4

Publications

88

Citations

4

H-Index

2004

Active since

Affiliations

Canon (Japan)(Current)

Toshiki Ito is an author at Canon (Japan) specializing in materials science, microelectronics, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationElectrical EngineeringNanoelectronicsNanolithographyIntegrated Circuits3D Printing

Publications per year

2004–2016

4

Publications

4

Fabrication of half-pitch 32nm resist patterns using near-field lithography with a-Si mask

Toshiki Ito, Tomohiro Yamada, Yasuhisa Inao et al. · Applied Physics Letters · 2006 · 30 citations

Engineering, Electron-beam Lithography, Half-pitch 32Nm +18

Fabrication of sub-100nm Patterns using Near-field Mask Lithography with Ultra-thin Resist Process

Toshiki Ito, Masaya Ogino, Tomohiro Yamanaka et al. · Journal of Photopolymer Science and Technology · 2005 · 28 citations · Full text

Engineering, Electron-beam Lithography, Pattern Transfer +20

Biocompatibility of Composite Membrane Consisting of Oriented Needle-like Apatite and Biodegradable Copolymer with Soft and Hard Tissues in Rats

T. Watanabe, Seiji Ban, Toshiki Ito et al. · Dental Materials Journal · 2004 · 16 citations · Full text

Nanoimprint System for High Volume Semiconductor Manufacturing; Requirement for Resist Materials

Toshiki Ito, Keiji Emoto, Tsuneo Takashima et al. · Journal of Photopolymer Science and Technology · 2016 · 14 citations · Full text

Engineering, Electron-beam Lithography, Pattern Transfer +22

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