Yasuhisa Inao - Concepedia

Author

Yasuhisa Inao

Also Known As

Y. Inao, Yasuhisa Inao

Publications

104

Citations

H-Index

Concepts

All Affiliations

Yasuhisa Inao is an author at Canon (Japan) specializing in applied physics, engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	82
2	Applied Physics	3	3	82
3	Electrical Engineering	2	2	58
4	Materials Science	2	2	58
5	Integrated Circuits	2	2	58

Yasuhisa Inao

Publications

Citations

H-Index

Page 1

	Year	Citations
Fabrication of half-pitch 32nm resist patterns using near-field lithography with a-Si mask Toshiki Ito, Tomohiro Yamada, Yasuhisa Inao, Applied Physics Letters EngineeringElectron-beam LithographyHalf-pitch 32NmOptoelectronic DevicesIntegrated Circuits	2006	30
Fabrication of sub-100nm Patterns using Near-field Mask Lithography with Ultra-thin Resist Process Toshiki Ito, Masaya Ogino, Tomohiro Yamanaka, Journal of Photopolymer Science and Technology EngineeringElectron-beam LithographyPattern TransferIntegrated CircuitsNear-field Mask Lithography	2005	28
Near-field lithography as prototype nano-fabrication tool Yasuhisa Inao, Shinji Nakasato, R. Kuroda, Microelectronic Engineering EngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnology	2007	24

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