Publication | Closed Access
Near-field lithography as prototype nano-fabrication tool
24
Citations
3
References
2007
Year
EngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyNear-field LithographyNanomanufacturingApplied PhysicsNanolithographyNanofabricationNanolithography Method
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