Concepedia

Joseph Race

JR

Statistics

Publications

6

Citations

100

H-Index

6

Active since

2013

Affiliations

GlobalFoundries (United States)(Current)

Nanosys (United States)

Center for Nanoscale Science and Technology

University at Albany, State University of New York

Joseph Race is an author at GlobalFoundries (United States) specializing in materials science, scatterometry, and materials engineering.

Publications per year

2013–2016

6

Publications

6

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Dhairya Dixit, Samuel O’Mullane, Sravan Sunkoju et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 23 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Dhairya Dixit, Avery Green, Erik R. Hosler et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Metrology for block copolymer directed self-assembly structures using Mueller matrix-based scatterometry

Dhairya Dixit, Vimal Kamineni, Richard A. Farrell et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 17 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Mueller based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties

Gangadhara Raja Muthinti, Manasa Medikonda, Jody Fronheiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 17 citations

Engineering, Electrical Engineering, Materials Science +17

Enhancing one dimensional sensitivity with plasmonic coupling

Samuel O’Mullane, Brennan Peterson, Joseph Race et al. · Optics Express · 2014 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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