Concepedia

Theo Modderman

TM

3

Publications

60

Citations

3

H-Index

2001

Active since

Affiliations

ASML (Netherlands)(Current)

Theo Modderman is an author at ASML (Netherlands) specializing in optical properties, applied physics, and computational imaging.

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Publications per year

2001–2019

3

Publications

3

Performance results of a new generation of 300-mm lithography systems

Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations

ASML NXE pellicle update

Derk Brouns, Pär Broman, Jan-Willem van der Horst et al. · 2019 · 16 citations

, , +12

Immersion lithography with an ultrahigh-NA in-line catadioptric lens and a high-transmission flexible polarization illumination system

Hans Jasper, Theo Modderman, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 15 citations

, , +22

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