Statistics
Publications
3
Citations
61
H-Index
3
Active since
2001
Affiliations
ASML (Netherlands)(Current)
Theo Modderman is an author at ASML (Netherlands) specializing in optics, productivity, and engineering.
Publications per year
2001–2019
3
3
Performance results of a new generation of 300-mm lithography systems
Boudewijn Sluijk, Tom Castenmiller, Richard du Croo de Jongh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations
Engineering, Electrical Engineering, Manufacturing Engineering +9
Hans Jasper, Theo Modderman, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 16 citations
Derk Brouns, Pär Broman, Jan-Willem van der Horst et al. · 2019 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +9
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