Hideo Akiya

The composition of octahedron structures that act as an origin of defects in thermal SiO2 on Czochralski silicon

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Journal of Applied Physics · 1995 · 119 citations

Materials Science, Materials Engineering, Ii-vi Semiconductor +15

Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Japanese Journal of Applied Physics · 1996 · 67 citations

Engineering, Silicon On Insulator, Si Crystal Growth +16

Polymer deposition and etching mechanisms in C2F6 radio-frequency plasma as studied by laser-induced fluorescence

Mamoru Kitamura, Hideo Akiya, Tsuneo Urisu · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 29 citations

Spatial Profiles, Plasma Electronics, Polymer Deposition +13

Novel global planarization technology for interlayer dielectrics using spin on glass film transfer and hot pressing

Katsuyuki Machida, Hakaru Kyuragi, Hideo Akiya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 27 citations

Engineering, Mechanical Engineering, Inexpensive Global Planarization +18

Cavernous undercuts appearing in reactive ion etched submicron-wide deep trenches

Shigehisa Ohki, M. Oda, Hideo Akiya et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 24 citations

Ion Implantation, Engineering, Physics +9