Concepedia

Takemi Ueki

TU

11

Publications

340

Citations

10

H-Index

1983

Active since

Affiliations

NTT (Japan)(Current)

NTT Basic Research Laboratories

Takemi Ueki is an author at NTT (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsMicroelectronicsDefect ToleranceMaterials EngineeringCondensed Matter PhysicsNanoelectronicsCrystalline Defects

Publications per year

1983–2001

11

Publications

11

The composition of octahedron structures that act as an origin of defects in thermal SiO2 on Czochralski silicon

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Journal of Applied Physics · 1995 · 119 citations

Materials Science, Materials Engineering, Ii-vi Semiconductor +15

Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Japanese Journal of Applied Physics · 1996 · 67 citations

Engineering, Silicon On Insulator, Si Crystal Growth +16

Octahedral void defects observed in the bulk of Czochralski silicon

Takemi Ueki, Manabu Itsumi, Tadao Takeda · Applied Physics Letters · 1997 · 43 citations

Materials Science, Engineering, Physics +14

Octahedral Void Structure Observed in Grown-In Defects in the Bulk of Standard Czochralski-Si for MOS LSIs

Takemi Ueki, Manabu Itsumi, Tadao Takeda · Japanese Journal of Applied Physics · 1997 · 25 citations

Materials Science, Standard Czochralski-si, Sio 2 +15

Analysis of Side-Wall Structure of Grown-in Twin-Type Octahedral Defects in Czochralski Silicon

Takemi Ueki, Manabu Itsumi, Tadao Takeda · Japanese Journal of Applied Physics · 1998 · 18 citations

Side-wall Structure, Engineering, Integrated Circuits +17

Rows per page

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