Manabu Itsumi

The composition of octahedron structures that act as an origin of defects in thermal SiO2 on Czochralski silicon

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Journal of Applied Physics · 1995 · 119 citations

Materials Science, Materials Engineering, Ii-vi Semiconductor +15

Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in Metal-Oxide-Semiconductor Large-Scale-Integrated Circuits

Manabu Itsumi, Hideo Akiya, Takemi Ueki et al. · Japanese Journal of Applied Physics · 1996 · 67 citations

Engineering, Silicon On Insulator, Si Crystal Growth +16

A lifetime projection method using series model and acceleration factors for TDDB failures of thin gate oxides

Noboru Shiono, Manabu Itsumi · 1993 · 57 citations

Engineering, Series Model, Reliability Engineering +16

Positive and negative charging of thermally grown SiO2 induced by Fowler-Nordheim emission

Manabu Itsumi · Journal of Applied Physics · 1981 · 55 citations

Engineering, Gate Voltage, Chemistry +18

Octahedral void defects observed in the bulk of Czochralski silicon

Takemi Ueki, Manabu Itsumi, Tadao Takeda · Applied Physics Letters · 1997 · 43 citations

Materials Science, Engineering, Physics +14