Concepedia

Katsuyuki Machida

KM

60

Publications

1.3K

Citations

19

H-Index

1986

Active since

Affiliations

NTT (Japan)(Current)

Tokyo Institute of Technology

The University of Tokyo

Japan Science and Technology Agency

National Institute of Advanced Industrial Science and Technology

Katsuyuki Machida is an author at NTT (Japan) specializing in engineering, microfabrication, and microelectronics.

Top concepts

EngineeringMicroelectronicsMicrofabricationElectrical EngineeringMaterial ScienceMicroelectromechanical SystemsApplied PhysicsMechanical EngineeringElectronic PackagingBiometrics

Publications per year

1986–2022

60

Publications

60

Design of sub-1g microelectromechanical systems accelerometers

Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima et al. · Applied Physics Letters · 2014 · 74 citations · Full text

Proof Mass, Conventional Mems Accelerometers, Electrical Engineering +14

A single-chip fingerprint sensor and identifier

Satoshi Shigematsu, Hiroki Morimura, Y. Tanabe et al. · IEEE Journal of Solid-State Circuits · 1999 · 66 citations

Engineering, Biometric Privacy, Biometrics +18

Novel Surface Structure and Its Fabrication Process for MEMS Fingerprint Sensor

Norio Sato, Satoshi Shigematsu, Hiroki Morimura et al. · IEEE Transactions on Electron Devices · 2005 · 63 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +20

SiO2 planarization technology with biasing and electron cyclotron resonance plasma deposition for submicron interconnections

Katsuyuki Machida, Hideo Oikawa · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 58 citations

Engineering, Electron-beam Lithography, Integrated Circuits +22

A novel sensor cell architecture and sensing circuit scheme for capacitive fingerprint sensors

Hiroki Morimura, Satoshi Shigematsu, Katsuyuki Machida · IEEE Journal of Solid-State Circuits · 2000 · 57 citations

Image Sensor, Biomedical Sensors, Engineering +12

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