Takaaki Matsushima

Design of sub-1g microelectromechanical systems accelerometers

Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima et al. · Applied Physics Letters · 2014 · 75 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +16

Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer

Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima et al. · Japanese Journal of Applied Physics · 2013 · 27 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A dual-axis MEMS capacitive inertial sensor with high-density proof mass

Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi et al. · Microsystem Technologies · 2015 · 19 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14

A 0.1 G-to-20 G integrated MEMS inertial sensor

Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima et al. · Japanese Journal of Applied Physics · 2015 · 16 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

An arrayed accelerometer device of a wide range of detection for integrated CMOS–MEMS technology

Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima et al. · Japanese Journal of Applied Physics · 2014 · 13 citations

Engineering, Electrical Engineering, Mechanical Engineering +17