Shigemi Murakawa

Modeling of oxide breakdown from gate charging during resist ashing

S. Fang, Shigemi Murakawa, J.P. McVittie · IEEE Transactions on Electron Devices · 1994 · 53 citations

Engineering, Antenna Capacitor Structure, Plasma Science +17

A very low-temperature calorimeter with a (3He+4He) dilution refrigerator The heat capacity of trans-bis(ethylenediamine)-bis(isothiocyanato)nickel(II)

Shigemi Murakawa, Tomio Wakamatsu, Motohiro Nakano et al. · The Journal of Chemical Thermodynamics · 1987 · 35 citations

Chemical Engineering, Engineering, Differential Scanning Calorimetry +12

Mechanism of Surface Charging Effects on Etching Profile Defects

Shigemi Murakawa, J.P. McVittie · Japanese Journal of Applied Physics · 1994 · 32 citations

Engineering, Silicon On Insulator, Plasma Processing +16

Ion trajectory distortion and profile tilt by surface charging in plasma etching

Shigemi Murakawa, Sychyi Fang, J.P. McVittie · Applied Physics Letters · 1994 · 30 citations

Electrical Engineering, Plasma Electronics, Engineering +15

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Takuya Sugawara, S. Matsuyama, Masaru Sasaki et al. · Japanese Journal of Applied Physics · 2005 · 22 citations

Materials Science, Materials Engineering, Electrical Engineering +12