Statistics
Publications
10
Citations
243
H-Index
10
Active since
2005
Affiliations
Takuya Sugawara is an author at Stanford University specializing in semiconductor materials, materials science, and semiconductor device materials.
Publications per year
2005–2021
10
10
Takuya Sugawara, Yasuhiro Oshima, Raghavasimhan Sreenivasan et al. · Applied Physics Letters · 2007 · 53 citations
Raghavasimhan Sreenivasan, Takuya Sugawara, Krishna C. Saraswat et al. · Applied Physics Letters · 2007 · 33 citations
Natural Sciences, Materials Engineering, Materials Science +17
Mechanism of germanium plasma nitridation
Takuya Sugawara, Raghavasimhan Sreenivasan, Paul C. McIntyre · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +15
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