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S. Matsuyama

SM

1

Publications

22

Citations

1

H-Index

2005

Active since

Affiliations

Tokyo Electron (Japan)(Current)

S. Matsuyama is an author at Tokyo Electron (Japan) specializing in electrical engineering, nanoelectronics, and applied physics.

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Publications per year

2005–2005

1

Publications

1

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Takuya Sugawara, S. Matsuyama, Masaru Sasaki et al. · Japanese Journal of Applied Physics · 2005 · 22 citations

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