Joseph G. Garofalo

<title>Automated optical proximity correction: a rules-based approach</title>

O.W. Otto, Joseph G. Garofalo, Kevin Low et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 81 citations

Engineering, Optic Design, Computer-aided Design +17

Mask assisted off-axis illumination technique for random logic

Joseph G. Garofalo, C. J. Biddick, R. L. Kostelak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 35 citations

Illumination Modeling, Machine Vision, Engineering +11

Exposure characteristics of alternate aperture phase-shifting masks fabricated using a subtractive process

R. L. Kostelak, Christophe Pierrat, Joseph G. Garofalo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 24 citations

Engineering, Electron-beam Lithography, Ophthalmology +12

Focused-ion-beam repair of phase-shift photomasks

L. R. Harriott, Joseph G. Garofalo, R. L. Kostelak · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 15 citations

Photonics, Phase-shift Photolithography, Engineering +13

<title>Reduction of ASIC gate-level line-end shortening by mask compensation</title>

Joseph G. Garofalo, John J. DeMarco, J. W. Bailey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 15 citations

Physical Design (Electronics), Engineering, Mask Compensation +11