R. L. Kostelak

Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale

Eric Betzig, J. K. Trautman, T.D. Harris et al. · Science · 1991 · 1.5K citations

Engineering, Nano-optics, Microscopy +20

<title>Automated optical proximity correction: a rules-based approach</title>

O.W. Otto, Joseph G. Garofalo, Kevin Low et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 81 citations

Engineering, Optic Design, Computer-aided Design +17

Mask assisted off-axis illumination technique for random logic

Joseph G. Garofalo, C. J. Biddick, R. L. Kostelak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 35 citations

Illumination Modeling, Machine Vision, Engineering +11

Dry etch processing of GaAs/AlGaAs high electron mobility transistor structures

S. J. Pearton, F. Ren, J. R. Lothian et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 34 citations

Materials Engineering, Semiconductor Technology, Electrical Engineering +10

Exposure characteristics of alternate aperture phase-shifting masks fabricated using a subtractive process

R. L. Kostelak, Christophe Pierrat, Joseph G. Garofalo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 24 citations

Engineering, Electron-beam Lithography, Ophthalmology +12