Concepedia

J. E. Lieberman

JE

Statistics

Publications

4

Citations

262

H-Index

4

Active since

1982

Affiliations

IBM (United States)(Current)

J. E. Lieberman is an author at IBM (United States) specializing in natural sciences, optics, and optical lithography.

Publications per year

1982–2001

4

Publications

4

Frequency limitations of the two-point central difference differentiation algorithm

A. Terry Bahill, J.S. Kallman, J. E. Lieberman · Biological Cybernetics · 1982 · 135 citations

Computing, Computer Science, Algorithms +10

Projection reduction exposure with variable axis immersion lenses: Next generation lithography

H. C. Pfeiffer, R. S. Dhaliwal, S. D. Golladay et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 61 citations

Natural Sciences, Manufacturing Engineering, Biomedical Optics +11

PREVAIL—Electron projection technology approach for next-generation lithography

R. S. Dhaliwal, W. A. Enichen, S. D. Golladay et al. · IBM Journal of Research and Development · 2001 · 55 citations

Natural Sciences, Electrical Engineering, Physics +14

PREVAIL: Operation of the electron optics proof-of-concept system

Michael S. Gordon, J. E. Lieberman, Paul Petric et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 11 citations · Full text

Natural Sciences, Physics, Optics +8

1–4 of 4