W. A. Enichen is an author at IBM (United States) specializing in applied physics, microscopy, and microelectronics.
Top concepts
MicroscopyEngineeringApplied PhysicsMicroelectronicsMedicineOphthalmologyInstrumentationOptical SystemsOptoelectronicsMicrofabrication
Publications per year
1993–2001
2
2
EL-4, a new generation electron-beam lithography system
H. C. Pfeiffer, Donald Edward Davis, W. A. Enichen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 22 citations
Electrical Engineering, Engineering, Electron-beam Lithography +15
Rows per page
1–2 of 2