Steven F. Nagle

Power MEMS and microengines

Alan H. Epstein, S.D. Senturia, G. Anathasuresh et al. · 2002 · 153 citations

Engineering, Mechanical Engineering, Heat Transfer +13

An electrostatic induction micromotor supported on gas-lubricated bearings

Luc G. Fréchette, Steven F. Nagle, Reza Ghodssi et al. · 2002 · 77 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

An electric induction micromotor

Steven F. Nagle, Carol Livermore, Luc G. Fréchette et al. · Journal of Microelectromechanical Systems · 2005 · 51 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

Characterization of silicon wafer bonding for Power MEMS applications

Arturo A. Ayón, Xin Zhang, Kevin T. Turner et al. · Sensors and Actuators A Physical · 2002 · 31 citations

Engineering, Electrical Engineering, Materials Science +14

Tailoring etch directionality in a deep reactive ion etching tool

Arturo A. Ayón, Steven F. Nagle, Luc G. Fréchette et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 30 citations

Engineering, Electrical Engineering, Microfabrication +12