An electric induction micromotor

Abstract

This paper presents the analysis, design, fabrication, and testing of a planar electric induction micromotor. The micromotor is a 6-phase motor with 131 pole pairs distributed on a stator having a 4 mm outer diameter. The axial air gap is 3 /spl mu/m. With a 90 V stator excitation, applied at a 300-kHz slip frequency, the motor produces a torque of 2 /spl mu/N/spl middot/m. Special attention is paid to the limitations that microfabrication places on the design of the motor.