Concepedia

Publication | Closed Access

Characterization of silicon wafer bonding for Power MEMS applications

DOI

31

Citations

13

References

2002

Year

Arturo A. Ayón, Xin Zhang, Kevin T. Turner, Dongwon Choi, Bruno Miller, Steven F. Nagle, S.M. Spearing
Sensors and Actuators A Physical

References

YearCitations

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