Concepedia

Susumu Oogi

SO

Statistics

Publications

4

Citations

71

H-Index

4

Active since

1997

Affiliations

Toshiba (Japan)(Current)

National Institute of Technology, Numazu College

Susumu Oogi is an author at Toshiba (Japan) specializing in engineering, instrumentation, and electrical engineering.

Top concepts

EngineeringInstrumentationElectrical EngineeringApplied PhysicsMicroelectronicsPhysicsBiometricsMicroscopy3D PrintingCalibration

Publications per year

1997–2007

4

Publications

4

High-Accuracy Proximity Effect Correction for Mask Writing

Takayuki Abe, Yoshiaki Hattori, Tomohiro Iijima et al. · Japanese Journal of Applied Physics · 2007 · 32 citations

Image Analysis, Optimum Correction Dose, Engineering +8

Global Critical Dimension Correction: I. Fogging Effect Correction

Takayuki Abe, Junichi Suzuki, Jun Yashima et al. · Japanese Journal of Applied Physics · 2007 · 15 citations

Deblurring, Effect Correction, Electrical Engineering +9

Proximity Effect Correction For Electron Beam Lithography: Highly Accurate Correction Method

Takashi Kamikubo, Takayuki Abe, Susumu Oogi et al. · Japanese Journal of Applied Physics · 1997 · 13 citations

Electrical Engineering, Engineering, Proximity Effect Correction +15

Advanced electron-beam writing system EX-11 for next-generation mask fabrication

Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

Engineering, Electron-beam Lithography, Target Fabrication +16

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