Jun Yashima

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Active since

2007

Affiliations

National Institute of Technology, Numazu College(Current)

Jun Yashima is an author at National Institute of Technology, Numazu College specializing in semiconductor devices, electron beam lithography, and engineering.

Publications per year

2007–2016

Publications

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Global Critical Dimension Correction: I. Fogging Effect Correction

Takayuki Abe, Junichi Suzuki, Jun Yashima et al. · Japanese Journal of Applied Physics · 2007 · 15 citations

Engineering, Electrical Engineering, Optoelectronics +10

Electron beam mask writer EBM-9500 for logic 7nm node generation

Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Study of heating effect on CAR in electron beam mask writing

Takashi Kamikubo, Makoto Hiramoto, Jun Yashima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Engineering, Electrical Engineering, Physics +14

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

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