Yoshito Kamaji

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Taku Iwase, Yoshito Kamaji, Song Kang et al. · Japanese Journal of Applied Physics · 2019 · 39 citations

Engineering, Manufacturing Engineering, Materials Science +15

Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher

Shota Umeda, Kenji Tamaki, Masahiro Sumiya et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 20 citations

Engineering, Industrial Engineering, Forecasting +16

Imaging Performance Improvement of an Extreme Ultraviolet Microscope

Kei Takase, Yoshito Kamaji, Naoki Sakagami et al. · Japanese Journal of Applied Physics · 2010 · 19 citations

Medicine, Mechatronics Engineering, Digital Imaging +13

Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope

Yoshito Kamaji, Kei Takase, Takahiro Yoshizumi et al. · Japanese Journal of Applied Physics · 2009 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +15

Development of Extreme Ultraviolet Interference Lithography System

Yasuyuki Fukushima, Naoki Sakagami, Teruhiko Kimura et al. · Japanese Journal of Applied Physics · 2010 · 15 citations

Natural Sciences, Electrical Engineering, Materials Science +15