Yoshito Kamaji

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Taku Iwase, Yoshito Kamaji, Song Kang et al. · Japanese Journal of Applied Physics · 2019 · 33 citations

Engineering, Electron-beam Lithography, Pattern Transfer +21

Imaging Performance Improvement of an Extreme Ultraviolet Microscope

Kei Takase, Yoshito Kamaji, Naoki Sakagami et al. · Japanese Journal of Applied Physics · 2010 · 19 citations

Ultraviolet Light, Engineering, Microscopy +18

Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher

Shota Umeda, Kenji Tamaki, Masahiro Sumiya et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 19 citations

Software Maintenance, Engineering, Industrial Engineering +22

Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope

Yoshito Kamaji, Kei Takase, Takahiro Yoshizumi et al. · Japanese Journal of Applied Physics · 2009 · 18 citations

Engineering, Electron-beam Lithography, Microscopy +24

Development of Extreme Ultraviolet Interference Lithography System

Yasuyuki Fukushima, Naoki Sakagami, Teruhiko Kimura et al. · Japanese Journal of Applied Physics · 2010 · 15 citations

Spatial Coherence Length, Photonics, Optical Materials +15