Concepedia
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Publications
4
Citations
86
H-Index
Active since
2010
Affiliations
University of Hyogo(Current)
Japan Science and Technology Agency
Teruhiko Kimura is an author at University of Hyogo specializing in engineering, optical properties, and microfabrication.
Top concepts
EngineeringOptical PropertiesMicroscopyNanophotonicsOphthalmologyApplied PhysicsInstrumentationOptoelectronicsMicrofabricationOptical Materials
Publications per year
2010–2011
Imaging of extreme-ultraviolet mask patterns using coherent extreme-ultraviolet scatterometry microscope based on coherent diffraction imaging
Tetsuo Harada, Masato Nakasuji, Teruhiko Kimura et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 29 citations
Engineering, Microscopy, Coherent Diffraction Imaging +17
The coherent EUV scatterometry microscope for actinic mask inspection and metrology
Tetsuo Harada, Masato Nakasuji, Teruhiko Kimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations
Engineering, Microscopy, Optic Design +18
Development of Extreme Ultraviolet Interference Lithography System
Yasuyuki Fukushima, Naoki Sakagami, Teruhiko Kimura et al. · Japanese Journal of Applied Physics · 2010 · 15 citations
Spatial Coherence Length, Photonics, Optical Materials +15
EUV Interference Lithography for 22nm Node and Below
Yasunari Fukushima, Yuya Yamaguchi, Teruhiko Kimura et al. · Journal of Photopolymer Science and Technology · 2010 · 14 citations · Full text
Short Wavelength Optic, Optical Materials, Engineering +18
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