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Naoki Sakagami

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Publications

2

Citations

34

H-Index

2

Active since

2010

Affiliations

University of Hyogo(Current)

Naoki Sakagami is an author at University of Hyogo specializing in engineering, optical properties, and applied physics.

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Publications per year

2010–2010

2

Publications

2

Imaging Performance Improvement of an Extreme Ultraviolet Microscope

Kei Takase, Yoshito Kamaji, Naoki Sakagami et al. · Japanese Journal of Applied Physics · 2010 · 19 citations

, , +18

Development of Extreme Ultraviolet Interference Lithography System

Yasuyuki Fukushima, Naoki Sakagami, Teruhiko Kimura et al. · Japanese Journal of Applied Physics · 2010 · 15 citations

, , +15

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