Concepedia
Statistics
Publications
10
Citations
213
H-Index
Active since
2011
Affiliations
University of Hyogo(Current)
Japan Science and Technology Agency
RIKEN
Institute for Laser Technology
Nitto RIKEN (Japan)
Masato Nakasuji is an author at University of Hyogo specializing in microscopy, engineering, and ophthalmology.
Top concepts
MicroscopyEngineeringOphthalmologySpectroscopyOptical DiagnosticsPhysicsRadiologyApplied PhysicsInstrumentationNatural Sciences
Publications per year
2011–2013
Critical Dimension Measurement of an Extreme-Ultraviolet Mask Utilizing Coherent Extreme-Ultraviolet Scatterometry Microscope at NewSUBARU
Tetsuo Harada, Masato Nakasuji, Masaki Tada et al. · Japanese Journal of Applied Physics · 2011 · 35 citations
Ultraviolet Light, Engineering, Microscopy +17
Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Extreme-Ultraviolet Scatterometry Microscope
Tetsuo Harada, Masato Nakasuji, Yutaka Nagata et al. · Japanese Journal of Applied Physics · 2013 · 31 citations
Engineering, Microscopy, Phase Defect +17
Imaging of extreme-ultraviolet mask patterns using coherent extreme-ultraviolet scatterometry microscope based on coherent diffraction imaging
Tetsuo Harada, Masato Nakasuji, Teruhiko Kimura et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 29 citations
Engineering, Microscopy, Coherent Diffraction Imaging +17
The coherent EUV scatterometry microscope for actinic mask inspection and metrology
Tetsuo Harada, Masato Nakasuji, Teruhiko Kimura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 28 citations
Engineering, Microscopy, Optic Design +18
Phase imaging of EUV masks using a lensless EUV microscope
Tetsuo Harada, Masato Nakasuji, Yutaka Nagata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations
Engineering, Microscopy, Digital Holography +17
1–5 of 10