Concepedia

Author

Taku Iwase

Hitachi (Japan)ORCID

Also Known As

T Iwase, T. Iwase, Taku IWASE, Taku Iwase

50

Publications

212

Citations

8

H-Index

23

Concepts

All Affiliations

Hitachi (Japan)Hitachi High-Tech (Japan)
TI

About

Taku Iwase is an author at Hitachi (Japan) specializing in engineering, surface science, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

125

2

Applied Physics

4

4

78

3

Chemistry

2

2

63

4

Chemical Engineering

1

1

47

5

Electrical Engineering

1

1

17

Taku Iwase

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6

Publications

152

Citations

6

H-Index

YearCitations

Proton conducting behavior of poly(ethylenimine)-H3PO4 systems

Ryuichi Tanaka, Hajime Yamamoto, Sumito Kawamura,

Electrochimica Acta

1995

47

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Taku Iwase, Yoshito Kamaji, Song Kang,

Japanese Journal of Applied Physics

2019

33

Effect of oxygen addition to an argon plasma on etching selectivity of poly(methyl methacrylate) to polystyrene

Makoto Satake, Taku Iwase, Masaru Kurihara,

Journal of Micro/Nanolithography MEMS and MOEMS

2013

27

Formation Mechanism of Rounded SiGe-Etch Front in Isotropic SiGe Plasma Etching for Gate-All-Around FETs

Yu Zhao, Taku Iwase, Makoto Satake,

IEEE Journal of the Electron Devices Society

2021

17

Role of surface-reaction layer in HBr/fluorocarbon-based plasma with nitrogen addition formed by high-aspect-ratio etching of polycrystalline silicon and SiO<sub>2</sub> stacks

Taku Iwase, Miyako Matsui, Ken’etsu Yokogawa,

Japanese Journal of Applied Physics

2016

16

Eliminating dependence of hole depth on aspect ratio by forming ammonium bromide during plasma etching of deep holes in silicon nitride and silicon dioxide

Taku Iwase, Ken’etsu Yokogawa, Masahito Mori

Japanese Journal of Applied Physics

2018

12

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