Taku Iwase

Proton conducting behavior of poly(ethylenimine)-H3PO4 systems

Ryuichi Tanaka, Hajime Yamamoto, Sumito Kawamura et al. · Electrochimica Acta · 1995 · 47 citations

Conducting Polymer, Chemical Engineering, Engineering +5

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Taku Iwase, Yoshito Kamaji, Song Kang et al. · Japanese Journal of Applied Physics · 2019 · 33 citations

Engineering, Electron-beam Lithography, Pattern Transfer +21

Effect of oxygen addition to an argon plasma on etching selectivity of poly(methyl methacrylate) to polystyrene

Makoto Satake, Taku Iwase, Masaru Kurihara et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 27 citations · Full text

Formation Mechanism of Rounded SiGe-Etch Front in Isotropic SiGe Plasma Etching for Gate-All-Around FETs

Yu Zhao, Taku Iwase, Makoto Satake et al. · IEEE Journal of the Electron Devices Society · 2021 · 17 citations · Full text

Electrical Engineering, Engineering, Stem Edx +14

Role of surface-reaction layer in HBr/fluorocarbon-based plasma with nitrogen addition formed by high-aspect-ratio etching of polycrystalline silicon and SiO₂ stacks

Taku Iwase, Miyako Matsui, Ken’etsu Yokogawa et al. · Japanese Journal of Applied Physics · 2016 · 16 citations

Engineering, Integrated Circuits, Chemistry +19