Concepedia

Shota Umeda

SU

1

Publications

19

Citations

1

H-Index

2021

Active since

Affiliations

Hitachi (Japan)(Current)

Shota Umeda is an author at Hitachi (Japan) specializing in software maintenance, predictive analytics, and predictive maintenance.

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Publications per year

2021–2021

1

Publications

1

Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher

Shota Umeda, Kenji Tamaki, Masahiro Sumiya et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 19 citations

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