Z.L. Zhang

Selective chemical vapor deposition of tungsten for microelectromechanical structures

Noel C. MacDonald, L.Y. Chen, J. Yao et al. · Sensors and Actuators · 1989 · 53 citations · Full text

Engineering, Microelectromechanical Structures, Mechanical Engineering +21

SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures

K.A. Shaw, Z.L. Zhang, Noel C. MacDonald · 2002 · 51 citations

Engineering, Process Outline, Electron-beam Lithography +22

Fabrication of submicron high-aspect-ratio GaAs actuators

Z.L. Zhang, Noel C. MacDonald · Journal of Microelectromechanical Systems · 1993 · 36 citations

Electrical Engineering, Electronic Devices, Engineering +14

Selective chemical vapor deposition of tungsten for microdynamic structures

L.Y. Chen, Z.L. Zhang, J. Yao et al. · 2003 · 32 citations

Materials Science, Ion Implantation, Engineering +15

An RIE process for submicron, silicon electromechanical structures

Z.L. Zhang, Noel C. MacDonald · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 27 citations

Engineering, Silicon Rie, Mechanical Engineering +17