Concepedia

Author

Z.L. Zhang

Cornell UniversityORCID

Also Known As

Z.L. Zhang, Zihao Zhang

11

Publications

238

Citations

7

H-Index

22

Concepts

All Affiliations

Cornell University
ZZ

About

Z.L. Zhang is an author at Cornell University specializing in engineering, microfabrication, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

227

2

Applied Physics

6

6

200

3

Materials Science

4

4

163

4

Materials Engineering

3

3

120

5

Electrical Engineering

2

2

52

Z.L. Zhang

×

7

Publications

227

Citations

7

H-Index

YearCitations

Selective chemical vapor deposition of tungsten for microelectromechanical structures

Noel C. MacDonald, L.Y. Chen, J. Yao,

Sensors and Actuators

1989

53

SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures

K.A. Shaw, Z.L. Zhang, Noel C. MacDonald

2002

51

Fabrication of submicron high-aspect-ratio GaAs actuators

Z.L. Zhang, Noel C. MacDonald

Journal of Microelectromechanical Systems

1993

36

Selective chemical vapor deposition of tungsten for microdynamic structures

L.Y. Chen, Z.L. Zhang, J. Yao,

2003

32

An RIE process for submicron, silicon electromechanical structures

Z.L. Zhang, Noel C. MacDonald

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

2002

27

Submicron, movable gallium arsenide mechanical structures and actuators

Z.L. Zhang, G. A. Porkolab, Noel C. MacDonald

1992

16

Single-crystal silicon torsional resonators

R.E. Mihailovich, Z.L. Zhang, K.A. Shaw,

2002

12

Page 1