L.Y. Chen is an author at Cornell University specializing in microfabrication, mechanical engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationNanomanufacturingMaterials FabricationMechanical EngineeringThin FilmsMicrostructure
Publications per year
1989–2003
2
2
Selective chemical vapor deposition of tungsten for microdynamic structures
L.Y. Chen, Z.L. Zhang, J. Yao et al. · 2003 · 32 citations
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