W. M. Paulson

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Craig M. Herzinger, Blaine Johs, William A. McGahan et al. · Journal of Applied Physics · 1998 · 1.1K citations

Optical Materials, Engineering, Optical Glass +23

Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles

Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam et al. · Thin Solid Films · 1998 · 128 citations

Engineering, Physics, Optical Properties +9

Interdiffusion in composition-modulated copper-gold thin films

W. M. Paulson, J. E. Hilliard · Journal of Applied Physics · 1977 · 64 citations

Materials Science, Effective Diffusion Coefficient, Optical Materials +13

A 6 V embedded 90 nm silicon nanocrystal nonvolatile memory

R. Muralidhar, R.F. Steimle, M. Sadd et al. · 2004 · 63 citations

Non-volatile Memory, Electrical Engineering, Engineering +12

Rapid isothermal annealing of As-, P-, and B-implanted silicon

S. R. Wilson, W. M. Paulson, R. B. Gregory et al. · Journal of Applied Physics · 1984 · 62 citations

Semiconductors, Materials Science, Electrical Engineering +14