M. Cornara

Oxygen precipitation in silicon: Experimental studies and theoretical investigations within the classical theory of nucleation

K. F. Kelton, R. Falster, D. Gambaro et al. · Journal of Applied Physics · 1999 · 75 citations

Engineering, Oxygen Precipitation, Oxygen Isotope +16

Effect of High Temperature Pre-Anneal on Oxygen Precipitates Nucleation Kinetics in Si

R. Falster, M. Cornara, D. Gambaro et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1997 · 54 citations

Engineering, High Temperature Pre-anneal, Applied Physics +6

Vacancy-Assisted Oxygen Precipitation Phenomena in Si

R. Falster, Marco Pagani, D. Gambaro et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1997 · 54 citations

Engineering, Surface Science, Applied Physics +2

The Engineering of Silicon Wafer Material Properties Through Vacancy Concentration Profile Control and the Achievement of Ideal Oxygen Precipitation Behavior

R. Falster, D. Gambaro, M. Olmo et al. · MRS Proceedings · 1998 · 45 citations

Materials Engineering, Wafer Scale Processing, Engineering +7

Observation of Vacancy Enhancement during Rapid Thermal Annealing in Nitrogen

Mohan V. Jacob, P. Pichler, H. Ryssel et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1997 · 19 citations