Effect of High Temperature Pre-Anneal on Oxygen Precipitates Nucleation Kinetics in Si - Concepedia

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Effect of High Temperature Pre-Anneal on Oxygen Precipitates Nucleation Kinetics in Si

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References

1997

Year

R. Falster, M. Cornara, D. Gambaro, M. Olmo, Marco Pagani

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

EngineeringHigh Temperature Pre-annealApplied PhysicsNucleationChemistryHydrogenSilicon On InsulatorTransformation KineticsChemical Kinetics

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