Concepedia

Author

S. Aachboun

Centre National de la Recherche Scientifique

Also Known As

S. Aachboun, Said Aachboun

8

Publications

371

Citations

5

H-Index

18

Concepts

All Affiliations

Centre National de la Recherche ScientifiqueGroupe de Recherches sur l'Energétique des Milieux IonisésUniversité d'OrléansSTMicroelectronics (France)
SA

About

S. Aachboun is an author at Centre National de la Recherche Scientifique specializing in applied physics, microfabrication, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

365

2

Applied Physics

5

5

365

3

Materials Science

3

3

251

4

Physics

3

3

207

5

Mechanical Engineering

2

2

148

S. Aachboun

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5

Publications

365

Citations

5

H-Index

YearCitations

Deep anisotropic etching of silicon

S. Aachboun, P. Ranson

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1999

93

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

Mohamed Boufnichel, S. Aachboun, F. Grangeon,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2002

92

Cryogenic etching of deep narrow trenches in silicon

S. Aachboun, P. Ranson, Claude Hilbert,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2000

66

Origin, control and elimination of undercut in silicon deep plasma etching in the cryogenic process

Mohamed Boufnichel, Philippe Lefaucheux, S. Aachboun,

Microelectronic Engineering

2004

58

Profile control of high aspect ratio trenches of silicon. II. Study of the mechanisms responsible for local bowing formation and elimination of this effect

Mohamed Boufnichel, S. Aachboun, Philippe Lefaucheux,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2003

56

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