S. Aachboun

Deep anisotropic etching of silicon

S. Aachboun, P. Ranson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 93 citations

Materials Science, Deep Anisotropic Etching, High Density +14

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

Mohamed Boufnichel, S. Aachboun, F. Grangeon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 92 citations

Engineering, Mechanical Engineering, Deep Trenches +18

Cryogenic etching of deep narrow trenches in silicon

S. Aachboun, P. Ranson, Claude Hilbert et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 66 citations

Materials Science, Anisotropic Profiles, Engineering +13

Origin, control and elimination of undercut in silicon deep plasma etching in the cryogenic process

Mohamed Boufnichel, Philippe Lefaucheux, S. Aachboun et al. · Microelectronic Engineering · 2004 · 58 citations

Engineering, Physics, Microfabrication +8

Profile control of high aspect ratio trenches of silicon. II. Study of the mechanisms responsible for local bowing formation and elimination of this effect

Mohamed Boufnichel, S. Aachboun, Philippe Lefaucheux et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 56 citations

Engineering, Mechanical Engineering, Plasma Science +21