Concepedia

F. Grangeon

FG

Statistics

Publications

3

Citations

155

H-Index

3

Active since

1999

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

F. Grangeon is an author at École Polytechnique Fédérale de Lausanne specializing in materials science, surface science, and materials engineering.

Publications per year

1999–2002

3

Publications

3

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

Mohamed Boufnichel, S. Aachboun, F. Grangeon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 96 citations

, , +14

Applications of the cavity ring-down technique to a large-area rf-plasma reactor

F. Grangeon, Clothilde Monard, A.A. Howling et al. · Plasma Sources Science and Technology · 1999 · 47 citations · Full text

, , +13

Crossed Beam Pulsed Laser Deposition of cryolite thin films

L. Lambert, F. Grangeon, M. Autric · Applied Surface Science · 1999 · 12 citations · Full text

, , +14

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