Concepedia

F. Grangeon

FG

Statistics

Publications

3

Citations

151

H-Index

3

Active since

1999

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

F. Grangeon is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsThin FilmsMicrostructurePlasma PhysicsPlasma ScienceInstrumentationMicrofabrication

Publications per year

1999–2002

3

Publications

3

Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing

Mohamed Boufnichel, S. Aachboun, F. Grangeon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 92 citations

Engineering, Mechanical Engineering, Deep Trenches +18

Applications of the cavity ring-down technique to a large-area rf-plasma reactor

F. Grangeon, Clothilde Monard, J.-L. Dorier et al. · Plasma Sources Science and Technology · 1999 · 47 citations · Full text

Electrical Engineering, Chemical Engineering, Engineering +13

Crossed Beam Pulsed Laser Deposition of cryolite thin films

L. Lambert, F. Grangeon, M. Autric · Applied Surface Science · 1999 · 12 citations · Full text

Materials Science, Advanced Laser Processing, Engineering +6

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