Concepedia

Author

A. R. Heyd

Pennsylvania State University

Also Known As

A. R. Heyd, A.R. Heyd

15

Publications

163

Citations

6

H-Index

26

Concepts

All Affiliations

Pennsylvania State University
AR

About

A. R. Heyd is an author at Pennsylvania State University specializing in engineering, applied physics, and optoelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

144

2

Applied Physics

5

5

144

3

Electrical Engineering

4

4

103

4

Natural Sciences

1

1

41

5

Chemistry

1

1

49

A. R. Heyd

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5

Publications

144

Citations

5

H-Index

YearCitations

Gate quality Si3N4 prepared by low temperature remote plasma enhanced chemical vapor deposition for III–V semiconductor-based metal–insulator–semiconductor devices

D. G. Park, Ming Tao, D. Li,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1996

49

Simultaneous real-time spectroscopic ellipsometry and reflectance for monitoring thin-film preparation

Ilsin An, Hien V. Nguyen, A. R. Heyd,

Review of Scientific Instruments

1994

41

Ion beam etching of GaAs and GaAs/AlGaAs heterostructures probed in real time by spectroscopic ellipsometry

A. R. Heyd, Ilsin An, R. W. Collins,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1991

19

Monitoring ion etching of GaAs/AlGaAs heterostructures by real time spectroscopic ellipsometry: Determination of layer thicknesses, compositions, and surface temperature

A. R. Heyd, R. W. Collins, K. Vedam,

Applied Physics Letters

1992

18

Spectroellipsometry for characterization of Zn1−<i>x</i>Cd<i>x</i>Se multilayered structures on GaAs

Joungchel Lee, R. W. Collins, A. R. Heyd,

Applied Physics Letters

1996

17

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