Concepedia

Author

D. Li

University of Illinois Urbana-Champaign

Also Known As

D. Li

2

Publications

50

Citations

1

H-Index

8

Concepts

All Affiliations

University of Illinois Urbana-Champaign
DL

About

D. Li is an author at University of Illinois Urbana-Champaign specializing in engineering, electrical engineering, and semiconductors.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

49

2

Applied Physics

1

1

49

3

Chemistry

1

1

49

4

Electrical Engineering

1

1

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5

Electronic Devices

1

1

49

D. Li

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1

Publications

49

Citations

1

H-Index

YearCitations

Gate quality Si3N4 prepared by low temperature remote plasma enhanced chemical vapor deposition for III–V semiconductor-based metal–insulator–semiconductor devices

D. G. Park, Ming Tao, D. Li,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1996

49

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